Author Affiliations
Abstract
1 State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, School of Electromechnical Engineering, Guangdong University of Technology, Guangzhou 510006, People’s Republic of China
2 School of Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong
3 Guangdong ADA Intelligent Equipment Ltd, Foshan 510006, People’s Republic of China
4 Institute of Business Analysis and Supply Chain Management, College of Management, Shenzhen University, Shenzhen, People’s Republic of China
5 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332, United States of America
Solid-state nanopores with controllable pore size and morphology have huge application potential. However, it has been very challenging to process sub-10 nm silicon nanopore arrays with high efficiency and high quality at low cost. In this study, a method combining metal-assisted chemical etching and machine learning is proposed to fabricate sub-10 nm nanopore arrays on silicon wafers with various dopant types and concentrations. Through a SVM algorithm, the relationship between the nanopore structures and the fabrication conditions, including the etching solution, etching time, dopant type, and concentration, was modeled and experimentally verified. Based on this, a processing parameter window for generating regular nanopore arrays on silicon wafers with variable doping types and concentrations was obtained. The proposed machine-learning-assisted etching method will provide a feasible and economical way to process high-quality silicon nanopores, nanostructures, and devices. Supplementary material for this article is available online
sub-10 nm silicon nanopore array metal-assisted chemical etching silica-coated gold nanoparticles self-assembly machine learning 
International Journal of Extreme Manufacturing
2021, 3(3): 035104
刘会龙 1,2,*夏菁 1,2陈懂 1,2吕彦飞 1,2
作者单位
摘要
1 云南大学 物理与天文学院, 云南 昆明 650091
2 云南省粒子天体物理重点实验室, 云南 昆明 650091
艾里光束是一种新型无衍射光束,解决了激光在传播过程中的衍射效应。基于艾里变换技术,介绍一种可以通过椭圆平顶高斯光束产生的新型艾里光束,即可调谐艾里光束。通过理论计算,可以看出调节椭圆平顶高斯光束的束宽比可获得单尾艾里光束,同时,可调谐艾里光束的尾长可以通过调节入射椭圆平顶高斯光束的阶数来控制。通过研究,当束宽比p=1时,艾里光束的加速方向沿x轴45°方向; p=1/2时,加速方向沿x轴31°方向,p=1/3时,加速方向为沿x正方向,可见调节束宽比p的大小可以改变艾里光束的加速方向。
艾里光束 艾里变换 平顶高斯光束 传播特性 Airy beam Airy transform flat-topped Gaussian beam propagation properties 
应用光学
2016, 37(6): 847
Author Affiliations
Abstract
1 School of Science, Changchun University of Science and Technology, Changchun 130022, China
2 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
This Letter proposes a method to balance the gain and loss of the orthogonally polarized emissions of dual wavelengths in a solid laser cavity. By adjusting the tilt angle of the uncoated glass plate inserted into the cavity, the gain and loss of the orthogonally polarized emission lines with small intervals can be balanced to equalize the oscillation thresholds of the orthogonally polarized dual wavelengths. We select the birefringent crystal Nd:LiYF (Nd:YLF) as the gain media, and theoretically analyze the simultaneous oscillation conditions of dual wavelengths with π- and σ-polarized emissions from a four-level transition (F3/24I11/24 and F3/24I13/24) in Nd3+. A simple linear cavity structure is adopted in the experiment, and stable CW orthogonally polarized dual-wavelength laser outputs of 1047, and 1053, 1321, and 1313 nm are obtained.
140.3580 Lasers, solid-state 140.2020 Diode lasers 140.3430 Laser theory 140.3410 Laser resonators 
Chinese Optics Letters
2015, 13(3): 031402

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